Jeol JXA-8200

The JXA-8200 SuperProbe is a high resolution SEM and a WD/ED Combined Electron Probe Microanalyzer (EPMA). Our instrument is equipped with 5 wavelength dispersive X-ray spectrometers (WDS) and an energy dispersive X-ray spectrometer (EDS).

Specs for our instrument are as follows:

Software: JEOL proprietary software or Probe for Windows, Enterprise Edition

Accelerating voltage: 0.2 to 30 kV

- 0.2-30 kV: 0.1 steps

Electron probe current range: 10-12 to 10-5 A

- Electron probe current stability: ± 0.5 X 10-3/hr, ± 0.3 X 10-3/24hr,

Spectrometers (5 WDS and 1 EDS):


              -Detectable Wavelength Range: 0.087 to 9.3

              -Detectable Element Range: 5Be to 92U

              -Crystal Types: TAP, PETJ, PETH, LIF, LIFH, LDE1*, LDEB*, LDEC*

* Layered dispersive elements (LDEs) and gas-flow detectors allow light-element analyses


- Lithium drift type silicon semi-conductor detector

Secondary-electron (SE) and backscattered-electron (BSE) imaging:

- SE image resolution: 6 nm

- BSE image modes: composition and topography

- Scanning image magnification: 40X to 300,000X (theoretical)

Sample Specifications:

- Maximum sample size: 100 x 100 x 50 mm

- Maximum analyzable area: 90 x 90 mm

- Typical Sample Sizes:

- Up to 6, 1 inch diameter round mounts

- Up to 4, 27 mm X 54 mm thin sections

JEOL JXA-8200 Superprobe


There are two microscopes available for use at the lab. The Olympus SZX12 binocular microscope is best suited for grains or whole samples in which a polished flat surface has not been produced. The Olympus BX51 petrographic microscope is ideally suited for viewing thin sections. Both microscopes may be used for transmitted and reflected light. Typically used for white light microscopy, the Olympus SZX12 may also be set up with polarizing filters. Our lab also has a 0.24X lens for the SZX12 which permits a wide field of view. Either microscope can be used with the Jenoptik ProgRes Cfcool digital camera.

Microprobe Lab Microscopes: Olympus SZX12 (left) and Olympus BX51 (right)

Sample Preparation

Several diamond saws, grinders and polishers are available for use at EPS. Automated precision cutting can be done on the Accutom-50 and manual cutting can be done on the Buehler Isomet-1000 or LecoVC-50. Small samples may be ground and polished automatically using one of our two Minimet-1000 polishers or manually using the larger Struers Rotopol-11 or the Buehler metallurgical apparatus (not pictured).

Sample Prep2
Sample Prep Equipment: Accutom-50 (top left), Isomet-1000 (top right), Minimet-1000 (bottom left) and Rotopol-11 (bottom right)

Denton DV-502A